王彦照,宁吉丰,陈宏泰,房玉龙

高功率兼高光束质量的光泵浦垂直外腔面发射激光器（VECSEL）在激光显示、生命科学、国防军事、激光光谱学等许多方面具有重要的应用。为实现大功率光泵浦激光器需求，设计了976 nm的周期增益多量子阱结构以及反射率达到99.9%以上的多层布拉格反射镜（DBR）；为减小应变，采用GaAsP张应变垒层来补偿InGaAs量子阱的压应变；利用金属有机化学气相沉积（MOCVD）完成了外延结构制备，最终研制出976 nm VECSEL激光器。使用808 nm激光器泵浦，峰值位于980 nm左右，泵浦功率10 W时激光输出功率＞1 W，温漂系数＜0.1 nm/K，光束质量M2x＜1.1，M2y＜1.1，有潜力应用在对潜通信、流式细胞仪等领域。

半导体激光器；光泵浦；金属有机化学气相沉积（MOCVD）

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